Spin, Spray coating and Electrodeposition of photoresist for MEMS structures – A comparison
نویسندگان
چکیده
This paper presents three coating methods of photoresist, spin, spray and electrodeposition (ED) on large topography surfaces. Characteristics of each method as well as its advantage and disadvantages are outlined. A comparison is made to point out the most suitable coating method in terms of complexity, costs and type of
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